氮化鎵乾式蝕刻技術（ICP-RIE）之研究

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Keywords

@article{217054f6529a4eab8052e31802c4bc85,

title = "氮化鎵乾式蝕刻技術（ICP-RIE）之研究",

keywords = "乾式蝕刻, 感應耦合電漿, 氮化鎵",

author = "Liann-Be Chang and 書史劉",

year = "2001",

language = "繁體中文",

volume = "33",

pages = "136--142",

journal = "材料科學與工程",

issn = "0379-6906",

number = "3",

}