摘要
The electromigration (EM) phenomenon often exhibits two failure mechanisms. The early failures are due to voids developed in the via or at the via-line interface while the wear-out failures are predominantly attributed to voids developed within the interconnect line itself. Presence of these two failure mechanisms necessitates the use of a bimodal mixture distribution for analyzing EM data. Also, due to the presence of incubation time in EM, the three-parameter lognormal distribution should be applied to account for the initial failure-free duration. An efficient global optimization technique called "simulated annealing" is introduced in this work to globally optimize the log-likelihood function of the mixture distribution and determine the values of the lognormal parameters that accurately fit the experimental EM failure data.
| 原文 | 英語 |
|---|---|
| 頁(從 - 到) | 8804-8809 |
| 頁數 | 6 |
| 期刊 | Thin Solid Films |
| 卷 | 516 |
| 發行號 | 23 |
| DOIs | |
| 出版狀態 | 已出版 - 01 10 2008 |
| 對外發佈 | 是 |
指紋
深入研究「A bimodal three-parameter lognormal mixture distribution for electromigration failure analysis」主題。共同形成了獨特的指紋。引用此
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