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A bimodal three-parameter lognormal mixture distribution for electromigration failure analysis

  • Nanyang Technological University

研究成果: 期刊稿件 › 文章 › 同行評審

2 引文 斯高帕斯(Scopus)

摘要

The electromigration (EM) phenomenon often exhibits two failure mechanisms. The early failures are due to voids developed in the via or at the via-line interface while the wear-out failures are predominantly attributed to voids developed within the interconnect line itself. Presence of these two failure mechanisms necessitates the use of a bimodal mixture distribution for analyzing EM data. Also, due to the presence of incubation time in EM, the three-parameter lognormal distribution should be applied to account for the initial failure-free duration. An efficient global optimization technique called "simulated annealing" is introduced in this work to globally optimize the log-likelihood function of the mixture distribution and determine the values of the lognormal parameters that accurately fit the experimental EM failure data.

原文英語
頁(從 - 到)8804-8809
頁數6
期刊Thin Solid Films
卷516
發行號23
DOIs
出版狀態已出版 - 01 10 2008
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