@inproceedings{0b42d8b8cfc04e04b5f22172579d9ce7,
title = "A high-k Y2TiO5 charge trapping layer for high-density flash memory application",
author = "Pan, \{Tung Ming\} and Yeh, \{Wen Wei\} and Chang, \{Wei Tsung\} and Chen, \{Kai Ming\} and Chen, \{Jing Wei\} and Huang, \{Kuo Chan\}",
year = "2007",
doi = "10.1109/ISDRS.2007.4422266",
language = "英语",
isbn = "1424418917",
series = "2007 International Semiconductor Device Research Symposium, ISDRS",
booktitle = "2007 International Semiconductor Device Research Symposium, ISDRS",
note = "2007 International Semiconductor Device Research Symposium, ISDRS ; Conference date: 12-12-2007 Through 14-12-2007",
}