A miniature micro-machined millimeter-wave bandpass filter by complementary metal-oxide-semiconductor compatible inductively-coupled-plasma deep-trench technology

Jin Fa Chang*, Yo Sheng Lin, Chi Chen Chen, Chang Zhi Chen, Tao Wang, Shey Shi Lu

*此作品的通信作者

研究成果: 期刊稿件 › 文章 › 同行評審

1 引文 斯高帕斯（Scopus）

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Physics