A two-port ZnO/silicon Lamb wave resonator using phononic crystals

Chao Yi Huang; Jia Hong Sun; Tsung Tsong Wu

doi:10.1063/1.3467145

A two-port ZnO/silicon Lamb wave resonator using phononic crystals

Chao Yi Huang
, Jia Hong Sun
, Tsung Tsong Wu^*

^*此作品的通信作者

National Taiwan University

研究成果: 期刊稿件 › 文章 › 同行評審

66 引文斯高帕斯（Scopus）

摘要

We present numerical and experimental studies on a two-port ZnO/silicon Lamb wave resonator using two-dimensional phononic-crystal (PC) gratings. Band gaps and reflections of Lamb waves in PC structures were analyzed using the finite element method. Constructive interference was obtained with suitable reflective distance between wave sources and the PC. The simulated result was utilized to optimize the design of Lamb wave resonators. On the experimental side, a layered ZnO/Si Lamb wave resonator with square-lattice PC reflective gratings was fabricated. The measurement showed that with 15-row PCs, the resonator Q factor can be up to 2269 at 158.15 MHz resonant frequency.

原文	英語
文章編號	031913
期刊	Applied Physics Letters
卷	97
發行號	3
DOIs	https://doi.org/10.1063/1.3467145
出版狀態	已出版 - 19 07 2010
對外發佈	是

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abstract = "We present numerical and experimental studies on a two-port ZnO/silicon Lamb wave resonator using two-dimensional phononic-crystal (PC) gratings. Band gaps and reflections of Lamb waves in PC structures were analyzed using the finite element method. Constructive interference was obtained with suitable reflective distance between wave sources and the PC. The simulated result was utilized to optimize the design of Lamb wave resonators. On the experimental side, a layered ZnO/Si Lamb wave resonator with square-lattice PC reflective gratings was fabricated. The measurement showed that with 15-row PCs, the resonator Q factor can be up to 2269 at 158.15 MHz resonant frequency.",

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AU - Sun, Jia Hong

AU - Wu, Tsung Tsong

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N2 - We present numerical and experimental studies on a two-port ZnO/silicon Lamb wave resonator using two-dimensional phononic-crystal (PC) gratings. Band gaps and reflections of Lamb waves in PC structures were analyzed using the finite element method. Constructive interference was obtained with suitable reflective distance between wave sources and the PC. The simulated result was utilized to optimize the design of Lamb wave resonators. On the experimental side, a layered ZnO/Si Lamb wave resonator with square-lattice PC reflective gratings was fabricated. The measurement showed that with 15-row PCs, the resonator Q factor can be up to 2269 at 158.15 MHz resonant frequency.

AB - We present numerical and experimental studies on a two-port ZnO/silicon Lamb wave resonator using two-dimensional phononic-crystal (PC) gratings. Band gaps and reflections of Lamb waves in PC structures were analyzed using the finite element method. Constructive interference was obtained with suitable reflective distance between wave sources and the PC. The simulated result was utilized to optimize the design of Lamb wave resonators. On the experimental side, a layered ZnO/Si Lamb wave resonator with square-lattice PC reflective gratings was fabricated. The measurement showed that with 15-row PCs, the resonator Q factor can be up to 2269 at 158.15 MHz resonant frequency.

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A two-port ZnO/silicon Lamb wave resonator using phononic crystals

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