Antibacterial behavior of TaN-Ag nanocomposite thin films with and without annealing

J. H. Hsieh; C. C. Tseng; Y. K. Chang; S. Y. Chang; W. Wu

doi:10.1016/j.surfcoat.2008.06.107

Antibacterial behavior of TaN-Ag nanocomposite thin films with and without annealing

J. H. Hsieh
, C. C. Tseng
, Y. K. Chang
, S. Y. Chang
, W. Wu^*

^*此作品的通信作者

Ming Chi University of Technology
National Chung Hsing University

研究成果: 期刊稿件 › 文章 › 同行評審

56 引文斯高帕斯（Scopus）

摘要

TaN-Ag nanocomposite films were deposited by reactive cosputtering on Si. The films were then annealed using RTA (rapid thermal annealing) at 350 °C for 2, 4 and 8 min respectively to induce the nucleation and growth of Ag particles in TaN matrix and on film surface. FESEM (field emission scanning electron microscopy) were applied to characterize Ag nanoparticles emerged on the surface of TaN-Ag thin films. The effect of annealing on the antibacterial properties of these films was studied. The results first confirm that annealing by RTA can cause Ag nanoparticles with various sizes to emerge on the TaN surface. Consequently, the antibacterial behavior will vary, depending on the amount and size of the surfaced Ag particles.

原文	英語
頁（從 - 到）	5586-5589
頁數	4
期刊	Surface and Coatings Technology
卷	202
發行號	22-23
DOIs	https://doi.org/10.1016/j.surfcoat.2008.06.107
出版狀態	已出版 - 30 08 2008
對外發佈	是

存取文件

10.1016/j.surfcoat.2008.06.107

其它文件與鏈接

Link to publication in Scopus

引用此

@article{4f40413c98f94e298d3dd9da251c7013,

title = "Antibacterial behavior of TaN-Ag nanocomposite thin films with and without annealing",

abstract = "TaN-Ag nanocomposite films were deposited by reactive cosputtering on Si. The films were then annealed using RTA (rapid thermal annealing) at 350 °C for 2, 4 and 8 min respectively to induce the nucleation and growth of Ag particles in TaN matrix and on film surface. FESEM (field emission scanning electron microscopy) were applied to characterize Ag nanoparticles emerged on the surface of TaN-Ag thin films. The effect of annealing on the antibacterial properties of these films was studied. The results first confirm that annealing by RTA can cause Ag nanoparticles with various sizes to emerge on the TaN surface. Consequently, the antibacterial behavior will vary, depending on the amount and size of the surfaced Ag particles.",

keywords = "C-AFM, Cosputtering, Nanocomposite thin films, TaN-Ag",

author = "Hsieh, \{J. H.\} and Tseng, \{C. C.\} and Chang, \{Y. K.\} and Chang, \{S. Y.\} and W. Wu",

year = "2008",

month = aug,

day = "30",

doi = "10.1016/j.surfcoat.2008.06.107",

language = "英语",

volume = "202",

pages = "5586--5589",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

number = "22-23",

}

TY - JOUR

T1 - Antibacterial behavior of TaN-Ag nanocomposite thin films with and without annealing

AU - Hsieh, J. H.

AU - Tseng, C. C.

AU - Chang, Y. K.

AU - Chang, S. Y.

AU - Wu, W.

PY - 2008/8/30

Y1 - 2008/8/30

N2 - TaN-Ag nanocomposite films were deposited by reactive cosputtering on Si. The films were then annealed using RTA (rapid thermal annealing) at 350 °C for 2, 4 and 8 min respectively to induce the nucleation and growth of Ag particles in TaN matrix and on film surface. FESEM (field emission scanning electron microscopy) were applied to characterize Ag nanoparticles emerged on the surface of TaN-Ag thin films. The effect of annealing on the antibacterial properties of these films was studied. The results first confirm that annealing by RTA can cause Ag nanoparticles with various sizes to emerge on the TaN surface. Consequently, the antibacterial behavior will vary, depending on the amount and size of the surfaced Ag particles.

AB - TaN-Ag nanocomposite films were deposited by reactive cosputtering on Si. The films were then annealed using RTA (rapid thermal annealing) at 350 °C for 2, 4 and 8 min respectively to induce the nucleation and growth of Ag particles in TaN matrix and on film surface. FESEM (field emission scanning electron microscopy) were applied to characterize Ag nanoparticles emerged on the surface of TaN-Ag thin films. The effect of annealing on the antibacterial properties of these films was studied. The results first confirm that annealing by RTA can cause Ag nanoparticles with various sizes to emerge on the TaN surface. Consequently, the antibacterial behavior will vary, depending on the amount and size of the surfaced Ag particles.

KW - C-AFM

KW - Cosputtering

KW - Nanocomposite thin films

KW - TaN-Ag

UR - https://www.scopus.com/pages/publications/50349086294

U2 - 10.1016/j.surfcoat.2008.06.107

DO - 10.1016/j.surfcoat.2008.06.107

M3 - 文章

AN - SCOPUS:50349086294

SN - 0257-8972

VL - 202

SP - 5586

EP - 5589

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 22-23

ER -

Antibacterial behavior of TaN-Ag nanocomposite thin films with and without annealing

摘要

存取文件

其它文件與鏈接

指紋

引用此