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Blech effect in Cu interconnects with oxide and low-k dielectrics

  • Nanyang Technological University

研究成果: 圖書/報告稿件的類型會議稿件同行評審

5 引文 斯高帕斯(Scopus)
原文英語
主出版物標題Proceedings of the 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2007
頁面65-69
頁數5
DOIs
出版狀態已出版 - 2007
對外發佈
事件2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Bangalore, 印度
持續時間: 11 07 200713 07 2007

出版系列

名字Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Conference

Conference2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits
國家/地區印度
城市Bangalore
期間11/07/0713/07/07

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