Carrier transportation mechanism of the TaN/HfO2/IL/Si structure with silicon surface fluorine implantation

Woei Cherng Wu, Chao Sung Lai*, Tzu Ming Wang, Jer Chyi Wang, Chih Wei Hsu, Ming Wen Ma, Wen Cheng Lo, Tien Sheng Chao

*此作品的通信作者

研究成果: 期刊稿件文章同行評審

28 引文 斯高帕斯(Scopus)

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Engineering