Carrier transportation mechanism of the TaN/HfO2/IL/Si structure with silicon surface fluorine implantation
Woei Cherng Wu, Chao Sung Lai*, Tzu Ming Wang, Jer Chyi Wang, Chih Wei Hsu, Ming Wen Ma, Wen Cheng Lo, Tien Sheng Chao
*此作品的通信作者
研究成果: 期刊稿件 › 文章 › 同行評審
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引文
斯高帕斯(Scopus)