Characteristics of atomic layer deposited high-k HfAlOx nanocrystals in n-Si/SiO2/HfO2/HfAlOx/Al2O3/Pt memory capacitors

W. C. Lee, Siddheswar Maikap, J. R. Yang

研究成果: 會議稿件的類型 › 會議論文

原文	美式英語
出版狀態	已出版 - 2008
事件	2008 International Electron Devices and Materials Symposia (IEDMS 2008) - Taichung,Taiwan 持續時間: 28 11 2008 → 29 11 2008

Conference	2008 International Electron Devices and Materials Symposia (IEDMS 2008)
期間	28/11/08 → 29/11/08

引用此

@conference{37a238bd68564948987c1149bab6a817,

title = "Characteristics of atomic layer deposited high-k HfAlOx nanocrystals in n-Si/SiO2/HfO2/HfAlOx/Al2O3/Pt memory capacitors",

author = "Lee, \{W. C.\} and Siddheswar Maikap and Yang, \{J. R.\}",

year = "2008",

language = "American English",

note = "2008 International Electron Devices and Materials Symposia (IEDMS 2008) ; Conference date: 28-11-2008 Through 29-11-2008",

}