Characterizations of composite TiO2-MgF2 films prepared by reactive ion-assisted coevaporation

Rung Ywan Tsai*, Mu Yi Hua, Chaur Tsang Wei, Fang C. Ho

*此作品的通信作者

研究成果: 期刊稿件文章同行評審

10 引文 斯高帕斯(Scopus)

摘要

Composite TiO2-MgF2 films are fabricated by reactive ion-assisted coevaporation. The optical, structural, mechanical, and chemical properties of these films are systematically studied. From the analysis of x-ray diffraction and spectrophotometer data the crystallographic phase compositions and the optical properties of the composite films are found to be controlled by the relative deposition rate of two evaporation sources. The refractive index and the microhardness of the composite films behave nonlinearly with respect to the composition of the films. When the molar fraction of TiO2 is higher than 40%, the hardness of the composite films exceeds that of pure TiO2 and glass substrate. The surface morphologies of all composite films are featureless and very smooth. It has been shown that composite TiO2-MgF2 films prepared by reactive ion-assisted coevaporation are very suitable for the design and fabrication of single-layer and multilayer antireflection coatings.

原文英語
頁(從 - 到)3411-3418
頁數8
期刊Optical Engineering
33
發行號10
DOIs
出版狀態已出版 - 1994
對外發佈

指紋

深入研究「Characterizations of composite TiO2-MgF2 films prepared by reactive ion-assisted coevaporation」主題。共同形成了獨特的指紋。

引用此