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Chemical bath deposition of SnO 2 and Cd 2 SnO 4 thin films

  • Hani Khallaf
  • , Chia Ta Chen
  • , Liann Be Chang
  • , Oleg Lupan
  • , Aniruddha Dutta
  • , Helge Heinrich
  • , Firoze Haque
  • , Enrique Del Barco
  • , Lee Chow*
  • *此作品的通信作者
  • University of Central Florida
  • Chang Gung University
  • Technical University of Moldova

研究成果: 期刊稿件 › 文章 › 同行評審

58 引文 斯高帕斯(Scopus)

摘要

A new approach of chemical bath deposition (CBD) of SnO 2 thin films is reported. Films with a 0.2 μm thickness are obtained using the multi-dip deposition approach with a deposition time as little as 8-10 min for each dip. The possibility of fabricating a transparent conducting oxide layer of Cd 2 SnO 4 thin films using CBD is investigated through successive layer deposition of CBD-SnO 2 and CBD-CdO films, followed by annealing at different temperatures. High quality films with transmittance exceeding 80% in the visible region are obtained. Annealed CBD-SnO 2 films are orthorhombic, highly stoichiometric, strongly adhesive, and transparent with an optical band gap of ∼4.42 eV. Cd 2 SnO 4 films with a band gap as high as 3.08 eV; a carrier density as high as 1.7 × 10 20 cm -3 ; and a resistivity as low as 1.01 × 10 -2 Ω cm are achieved.

原文英語
頁(從 - 到)6069-6074
頁數6
期刊Applied Surface Science
卷258
發行號16
DOIs
出版狀態已出版 - 01 06 2012
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