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Comparison of CeTiO3 and Ce2TiO5 Sensing Films for pH Sensors

  • Chang Gung Memorial Hospital
  • Chang Gung University
  • Cheng Hsin General Hospital
  • National Yang Ming Chiao Tung University

研究成果: 期刊稿件 › 文章 › 同行評審

2 引文 斯高帕斯(Scopus)

摘要

In this letter, we compared the structural and sensing properties of CeTiO3 and Ce2TiO5 sensing films for electrolyte-insulator-semiconductor (EIS) pH sensors. The structural behavior of these sensing films was characterized by Auger electron spectroscopy, atomic force microscopy, and X-ray photoelectron spectroscopy. In comparison with CeTiO3 sensing film, the EIS sensor using a Ce2TiO5 sensing film exhibited better sensing performance including higher sensitivity (68.35 mV/pH), lower hysteresis voltage (0.9 mV), and smaller drift rate (0.19 mV/h), presumably suggesting this film possessing a high fraction of Ce3+ and a rough surface.

原文英語
頁(從 - 到)885-888
頁數4
期刊IEEE Electron Device Letters
卷39
發行號6
DOIs
出版狀態已出版 - 06 2018

文獻附註

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© 1980-2012 IEEE.

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