Determination of linear birefringence of a multiple-order wave plate using a phase-sensitive ellipsometer

H. C. Wei, C. H. Hsieh, C. C. Tsai, L. P. Yu, C. Chou*

*此作品的通信作者

研究成果: 期刊稿件會議文章同行評審

摘要

A phase-sensitive interferometric ellipsometer is setup in order to characterize linearly birefringent parameters (no,ne,m) of a multiple-order wave plate (MWP) precisely where no and n e are refractive indices of ordinary and extraordinary rays respectively while m is the number of the order of interference. In order to avoid multiple reflections in MWP during the phase retardation measurement at oblique incidence, two tilted phase retardations with respect to the oblique incident angle rotated along x-axis and y-axis are measured and then subtracted from each other. In the mean time, the spatial shifting effect of the emerging beams from MWP is reduced too. This results the accuracy of linear birefringence measurement. Finally, a multiple-order quartz wave plate was tested. The experimental results verify that the phase-sensitive interferometric ellipsometer is able to precisely measure linear birefringence and the order number of a MWP. In this measurement, the phase stability of the interferometric ellipsometer was 0.3°/hr. It implies the sensitivity on refractive index measurement at δn∼10-6 was achieved in the experiment.

原文英語
頁(從 - 到)1411-1413
頁數3
期刊Physica Status Solidi (C) Current Topics in Solid State Physics
5
發行號5
DOIs
出版狀態已出版 - 2008
對外發佈
事件4th International Conference on Spectroscopic Ellipsometry, ICSE4 - Stockholm, 瑞典
持續時間: 11 06 200715 06 2007

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