TY - JOUR
T1 - Determination of linear birefringence of a multiple-order wave plate using a phase-sensitive ellipsometer
AU - Wei, H. C.
AU - Hsieh, C. H.
AU - Tsai, C. C.
AU - Yu, L. P.
AU - Chou, C.
PY - 2008
Y1 - 2008
N2 - A phase-sensitive interferometric ellipsometer is setup in order to characterize linearly birefringent parameters (no,ne,m) of a multiple-order wave plate (MWP) precisely where no and n e are refractive indices of ordinary and extraordinary rays respectively while m is the number of the order of interference. In order to avoid multiple reflections in MWP during the phase retardation measurement at oblique incidence, two tilted phase retardations with respect to the oblique incident angle rotated along x-axis and y-axis are measured and then subtracted from each other. In the mean time, the spatial shifting effect of the emerging beams from MWP is reduced too. This results the accuracy of linear birefringence measurement. Finally, a multiple-order quartz wave plate was tested. The experimental results verify that the phase-sensitive interferometric ellipsometer is able to precisely measure linear birefringence and the order number of a MWP. In this measurement, the phase stability of the interferometric ellipsometer was 0.3°/hr. It implies the sensitivity on refractive index measurement at δn∼10-6 was achieved in the experiment.
AB - A phase-sensitive interferometric ellipsometer is setup in order to characterize linearly birefringent parameters (no,ne,m) of a multiple-order wave plate (MWP) precisely where no and n e are refractive indices of ordinary and extraordinary rays respectively while m is the number of the order of interference. In order to avoid multiple reflections in MWP during the phase retardation measurement at oblique incidence, two tilted phase retardations with respect to the oblique incident angle rotated along x-axis and y-axis are measured and then subtracted from each other. In the mean time, the spatial shifting effect of the emerging beams from MWP is reduced too. This results the accuracy of linear birefringence measurement. Finally, a multiple-order quartz wave plate was tested. The experimental results verify that the phase-sensitive interferometric ellipsometer is able to precisely measure linear birefringence and the order number of a MWP. In this measurement, the phase stability of the interferometric ellipsometer was 0.3°/hr. It implies the sensitivity on refractive index measurement at δn∼10-6 was achieved in the experiment.
UR - http://www.scopus.com/inward/record.url?scp=77951124416&partnerID=8YFLogxK
U2 - 10.1002/pssc.200777812
DO - 10.1002/pssc.200777812
M3 - 会议文章
AN - SCOPUS:77951124416
SN - 1862-6351
VL - 5
SP - 1411
EP - 1413
JO - Physica Status Solidi (C) Current Topics in Solid State Physics
JF - Physica Status Solidi (C) Current Topics in Solid State Physics
IS - 5
T2 - 4th International Conference on Spectroscopic Ellipsometry, ICSE4
Y2 - 11 June 2007 through 15 June 2007
ER -