Electrical, material and multianalyte-sensitive characteristics of thermal CeO2/SiO2-stacked oxide capacitors

Chyuan Haur Kao; Hsiang Chen; Che Chun Liu; Chian Yu Chen; Yun Ti Chen; Yu Cheng Chu

doi:10.1016/j.tsf.2014.02.037

Electrical, material and multianalyte-sensitive characteristics of thermal CeO₂/SiO₂-stacked oxide capacitors

Chyuan Haur Kao, Hsiang Chen^*, Che Chun Liu, Chian Yu Chen, Yun Ti Chen, Yu Cheng Chu

^*此作品的通信作者

電子工程學系(含學碩博士班)

研究成果: 期刊稿件 › 文章 › 同行評審

6 引文斯高帕斯（Scopus）

摘要

A CeO₂/SiO₂ stacked sensing membrane annealed on silicon substrate for use in multi-analyte sensing was fabricated. Material properties were evaluated using X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy. Results indicate that an electrolyte-insulator-semiconductor sensor with a double-stacked membrane annealed at 800 °C exhibited good sensing performance with high sensitivity and a low drift rate. Additionally, the sensitivity for various ions of Na⁺, K⁺, urea, and glucose was conducted. CeO₂/SiO₂ sensing membranes show promise future industrial biosensing applications.

原文	英語
頁（從 - 到）	552-557
頁數	6
期刊	Thin Solid Films
卷	570
發行號	PB
DOIs	https://doi.org/10.1016/j.tsf.2014.02.037
出版狀態	已出版 - 03 11 2014

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© 2014 Elsevier B.V.

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10.1016/j.tsf.2014.02.037

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title = "Electrical, material and multianalyte-sensitive characteristics of thermal CeO2/SiO2-stacked oxide capacitors",

abstract = "A CeO2/SiO2 stacked sensing membrane annealed on silicon substrate for use in multi-analyte sensing was fabricated. Material properties were evaluated using X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy. Results indicate that an electrolyte-insulator-semiconductor sensor with a double-stacked membrane annealed at 800 °C exhibited good sensing performance with high sensitivity and a low drift rate. Additionally, the sensitivity for various ions of Na+, K+, urea, and glucose was conducted. CeO2/SiO2 sensing membranes show promise future industrial biosensing applications.",

keywords = "Annealing, CeO/SiO, Membrane pH values, Multi-analyte sensing",

author = "Kao, {Chyuan Haur} and Hsiang Chen and Liu, {Che Chun} and Chen, {Chian Yu} and Chen, {Yun Ti} and Chu, {Yu Cheng}",

note = "Publisher Copyright: {\textcopyright} 2014 Elsevier B.V.",

year = "2014",

month = nov,

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doi = "10.1016/j.tsf.2014.02.037",

language = "英语",

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T1 - Electrical, material and multianalyte-sensitive characteristics of thermal CeO2/SiO2-stacked oxide capacitors

AU - Kao, Chyuan Haur

AU - Chen, Hsiang

AU - Liu, Che Chun

AU - Chen, Chian Yu

AU - Chen, Yun Ti

AU - Chu, Yu Cheng

PY - 2014/11/3

Y1 - 2014/11/3

N2 - A CeO2/SiO2 stacked sensing membrane annealed on silicon substrate for use in multi-analyte sensing was fabricated. Material properties were evaluated using X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy. Results indicate that an electrolyte-insulator-semiconductor sensor with a double-stacked membrane annealed at 800 °C exhibited good sensing performance with high sensitivity and a low drift rate. Additionally, the sensitivity for various ions of Na+, K+, urea, and glucose was conducted. CeO2/SiO2 sensing membranes show promise future industrial biosensing applications.

AB - A CeO2/SiO2 stacked sensing membrane annealed on silicon substrate for use in multi-analyte sensing was fabricated. Material properties were evaluated using X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy. Results indicate that an electrolyte-insulator-semiconductor sensor with a double-stacked membrane annealed at 800 °C exhibited good sensing performance with high sensitivity and a low drift rate. Additionally, the sensitivity for various ions of Na+, K+, urea, and glucose was conducted. CeO2/SiO2 sensing membranes show promise future industrial biosensing applications.

KW - Annealing

KW - CeO/SiO

KW - Membrane pH values

KW - Multi-analyte sensing

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DO - 10.1016/j.tsf.2014.02.037

M3 - 文章

AN - SCOPUS:84911995983

SN - 0040-6090

VL - 570

SP - 552

EP - 557

JO - Thin Solid Films

JF - Thin Solid Films

IS - PB

ER -

Electrical, material and multianalyte-sensitive characteristics of thermal CeO2/SiO2-stacked oxide capacitors

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Electrical, material and multianalyte-sensitive characteristics of thermal CeO₂/SiO₂-stacked oxide capacitors