Fabrication of low-resistive p-type AZO thin films by N2 co-doping RF reactive magnetron sputtering

研究成果: 會議稿件的類型 › 會議論文

原文	美式英語
出版狀態	已出版 - 2009
事件	the International Conference in Semiconductors-25 - saint petersburg 持續時間: 20 07 2009 → 24 07 2009

Conference	the International Conference in Semiconductors-25
期間	20/07/09 → 24/07/09

引用此

@conference{5a2f87c02eb84725b5de34421755a8f8,

title = "Fabrication of low-resistive p-type AZO thin films by N2 co-doping RF reactive magnetron sputtering",

author = "Gwo-Mei Wu and Chi-You Lai and Jo-Ling Lu and Hsin-Chun Lu",

year = "2009",

language = "American English",

note = "the International Conference in Semiconductors-25 ; Conference date: 20-07-2009 Through 24-07-2009",

}