Fabrication of (TiZrNbSiMo)_1-xN_x high entropy alloy coatings using a high power impulse magnetron sputtering technique: Effects of nitrogen addition

Due to the outstanding mechanical and physical properties of high entropy alloy (HEA) coatings, the global academic and industrial communities have made significant research efforts in recent years, aiming to expand their industrial applications. In this study, TiZrNbSiMo and (TiZrNbSiMo)_1-xN_x HEA nitride coatings with different nitrogen contents were fabricated using a high power impulse magnetron sputtering (HiPIMS) system. By varying the nitrogen flow rates, the nitrogen contents of coatings increased from 0 to 48.8 at. %. The deposition rate decreased with increasing nitrogen content due to the target poisoning effect. Very fine and dense microstructure can be seen for each coating. The amorphous structure was obtained as the nitrogen content was lower than 19.1 at.%, whereas a nanocrystalline FCC structure was formed when the nitrogen content reached 34.9 at. %. Furthermore, the corrosion resistance of TiZrNbSiMo and four TiZrNbSiMoN HEA coatings in 0.5 M H₂SO₄ aqueous solution were superior to uncoated 304 stainless steel. We can conclude that the nanocrystalline TiZrNbSiMoN HEA coatings with a nitrogen content of 34.9 at. % exhibited a high hardness of 15.6 GPa, an electrical resistivity of 766.5 μΩ·cm, and an excellent corrosion polarization resistance of 9.71 × 10⁵ Ω·cm², 610.7 times higher than 304SS. This study provides valuable insights for future promising applications of (TiZrNbSiMo)_1-xN_x HEA nitride coatings in severely corrosive environments, such as the protective coatings on stainless steel bipolar plates in proton exchange membrane fuel cells.