GaN lattice matched ZnO/Pr2O3 film as gate dielectric oxide layer for AlGaN/GaN HEMT

Che Kai Lin; Ming Yang Chen; Hsiang Chun Wang; Chih Wei Yang; Chao Wei Chiu; Hsien Chin Chiu; Kuang Po Hsueh

doi:10.1109/EDSSC.2009.5394231

GaN lattice matched ZnO/Pr₂O₃ film as gate dielectric oxide layer for AlGaN/GaN HEMT

Che Kai Lin^*
, Ming Yang Chen
, Hsiang Chun Wang
, Chih Wei Yang
, Chao Wei Chiu
, Hsien Chin Chiu
, Kuang Po Hsueh

^*此作品的通信作者

電子工程學系(含學碩博士班)

Chang Gung University
Vanung University Taiwan

研究成果: 圖書/報告稿件的類型 › 會議稿件 › 同行評審

摘要

In this work, we perform AlGaN/GaN MOS-HEMT by using ZnO/Pr ₂O₃ as gate dielectric. After 600°C annealing, the XRD analysis shows ZnO thin films with highly crystalline characteristics, which exhibit a lattice constant (a=3.2498, c=5.2066) matched to GaN (a=3.1890, c=5.1855). The gate leakage current can be improved significantly by inserting ZnO/Pr₂O₃ dielectric layer; meanwhile, ZnO/Pr ₂O₃ MOS-HEMT shows superior breakdown voltage performance toward ZnO MOS-HEMT and conventional Ni/Au HEMT. From these results, ZnO/Pr ₂O₃ dielectric is promising for low leakage current of AlGaN/GaN based MOS-HEMT.

原文	英語
主出版物標題	2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009
頁面	408-411
頁數	4
DOIs	https://doi.org/10.1109/EDSSC.2009.5394231
出版狀態	已出版 - 2009
事件	2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009 - Xi'an, 中國持續時間: 25 12 2009 → 27 12 2009

出版系列

名字	2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009

Conference

Conference	2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009
國家/地區	中國
城市	Xi'an
期間	25/12/09 → 27/12/09

存取文件

10.1109/EDSSC.2009.5394231

其它文件與鏈接

Link to publication in Scopus

引用此

Lin, C. K., Chen, M. Y., Wang, H. C., Yang, C. W., Chiu, C. W., Chiu, H. C., & Hsueh, K. P. (2009). GaN lattice matched ZnO/Pr₂O₃ film as gate dielectric oxide layer for AlGaN/GaN HEMT. 於 2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009 (頁 408-411). 文章 5394231 (2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009). https://doi.org/10.1109/EDSSC.2009.5394231

@inproceedings{3943795eea6a4c7c846a59916b7b4364,

title = "GaN lattice matched ZnO/Pr2O3 film as gate dielectric oxide layer for AlGaN/GaN HEMT",

abstract = "In this work, we perform AlGaN/GaN MOS-HEMT by using ZnO/Pr 2O3 as gate dielectric. After 600°C annealing, the XRD analysis shows ZnO thin films with highly crystalline characteristics, which exhibit a lattice constant (a=3.2498, c=5.2066) matched to GaN (a=3.1890, c=5.1855). The gate leakage current can be improved significantly by inserting ZnO/Pr2O3 dielectric layer; meanwhile, ZnO/Pr 2O3 MOS-HEMT shows superior breakdown voltage performance toward ZnO MOS-HEMT and conventional Ni/Au HEMT. From these results, ZnO/Pr 2O3 dielectric is promising for low leakage current of AlGaN/GaN based MOS-HEMT.",

author = "Lin, \{Che Kai\} and Chen, \{Ming Yang\} and Wang, \{Hsiang Chun\} and Yang, \{Chih Wei\} and Chiu, \{Chao Wei\} and Chiu, \{Hsien Chin\} and Hsueh, \{Kuang Po\}",

year = "2009",

doi = "10.1109/EDSSC.2009.5394231",

language = "英语",

isbn = "9781424442980",

series = "2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009",

pages = "408--411",

booktitle = "2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009",

note = "2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009 ; Conference date: 25-12-2009 Through 27-12-2009",

}

Lin, CK, Chen, MY, Wang, HC, Yang, CW, Chiu, CW, Chiu, HC & Hsueh, KP 2009, GaN lattice matched ZnO/Pr₂O₃ film as gate dielectric oxide layer for AlGaN/GaN HEMT. 於 2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009., 5394231, 2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009, 頁 408-411, 2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009, Xi'an, 中國, 25/12/09. https://doi.org/10.1109/EDSSC.2009.5394231

GaN lattice matched ZnO/Pr₂O₃ film as gate dielectric oxide layer for AlGaN/GaN HEMT. / Lin, Che Kai; Chen, Ming Yang; Wang, Hsiang Chun 等.
2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009. 2009. p. 408-411 5394231 (2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009).

研究成果: 圖書/報告稿件的類型 › 會議稿件 › 同行評審

TY - GEN

T1 - GaN lattice matched ZnO/Pr2O3 film as gate dielectric oxide layer for AlGaN/GaN HEMT

AU - Lin, Che Kai

AU - Chen, Ming Yang

AU - Wang, Hsiang Chun

AU - Yang, Chih Wei

AU - Chiu, Chao Wei

AU - Chiu, Hsien Chin

AU - Hsueh, Kuang Po

PY - 2009

Y1 - 2009

N2 - In this work, we perform AlGaN/GaN MOS-HEMT by using ZnO/Pr 2O3 as gate dielectric. After 600°C annealing, the XRD analysis shows ZnO thin films with highly crystalline characteristics, which exhibit a lattice constant (a=3.2498, c=5.2066) matched to GaN (a=3.1890, c=5.1855). The gate leakage current can be improved significantly by inserting ZnO/Pr2O3 dielectric layer; meanwhile, ZnO/Pr 2O3 MOS-HEMT shows superior breakdown voltage performance toward ZnO MOS-HEMT and conventional Ni/Au HEMT. From these results, ZnO/Pr 2O3 dielectric is promising for low leakage current of AlGaN/GaN based MOS-HEMT.

AB - In this work, we perform AlGaN/GaN MOS-HEMT by using ZnO/Pr 2O3 as gate dielectric. After 600°C annealing, the XRD analysis shows ZnO thin films with highly crystalline characteristics, which exhibit a lattice constant (a=3.2498, c=5.2066) matched to GaN (a=3.1890, c=5.1855). The gate leakage current can be improved significantly by inserting ZnO/Pr2O3 dielectric layer; meanwhile, ZnO/Pr 2O3 MOS-HEMT shows superior breakdown voltage performance toward ZnO MOS-HEMT and conventional Ni/Au HEMT. From these results, ZnO/Pr 2O3 dielectric is promising for low leakage current of AlGaN/GaN based MOS-HEMT.

UR - https://www.scopus.com/pages/publications/77949592546

U2 - 10.1109/EDSSC.2009.5394231

DO - 10.1109/EDSSC.2009.5394231

M3 - 会议稿件

AN - SCOPUS:77949592546

SN - 9781424442980

T3 - 2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009

SP - 408

EP - 411

BT - 2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009

T2 - 2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009

Y2 - 25 December 2009 through 27 December 2009

ER -

Lin CK, Chen MY, Wang HC, Yang CW, Chiu CW, Chiu HC 等. GaN lattice matched ZnO/Pr₂O₃ film as gate dielectric oxide layer for AlGaN/GaN HEMT. 於 2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009. 2009. p. 408-411. 5394231. (2009 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2009). doi: 10.1109/EDSSC.2009.5394231