High-k HfxGdyOz charge trapping layer in silicon-oxide-nitride-silicon type nonvolatile memory by in situ radio frequency dual-sputtering method

Pai Chi Chou*, Chao Sung Lai, Jer Chyi Wang, Woei Cherng Wu, Li Chi Liu, Yu Ching Fang, Li Hsu, Hui Chun Wang

*此作品的通信作者

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Chemistry

Material Science