High-k Yb2O3 thin films as a sensing membrane for pH-ISFET application

Tung Ming Pan; Fa Hsyang Chen; Cheng Da Lee; Yu Kai Chien; Ho Ming Ko

doi:10.1109/ISDRS.2009.5378146

High-k Yb₂O₃ thin films as a sensing membrane for pH-ISFET application

Tung Ming Pan^*, Fa Hsyang Chen, Cheng Da Lee, Yu Kai Chien, Ho Ming Ko

^*此作品的通信作者

電子工程學系(含學碩博士班)

Chang Gung University

研究成果: 圖書/報告稿件的類型 › 會議稿件 › 同行評審

1 引文斯高帕斯（Scopus）

原文	英語
主出版物標題	2009 International Semiconductor Device Research Symposium, ISDRS '09
DOIs	https://doi.org/10.1109/ISDRS.2009.5378146
出版狀態	已出版 - 2009
事件	2009 International Semiconductor Device Research Symposium, ISDRS '09 - College Park, MD, 美國持續時間: 09 12 2009 → 11 12 2009

出版系列

名字	2009 International Semiconductor Device Research Symposium, ISDRS '09

Conference

Conference	2009 International Semiconductor Device Research Symposium, ISDRS '09
國家/地區	美國
城市	College Park, MD
期間	09/12/09 → 11/12/09

存取文件

10.1109/ISDRS.2009.5378146

其它文件與鏈接

Link to publication in Scopus

引用此

@inproceedings{286541f5260f48668505088d4cd567e1,

title = "High-k Yb2O3 thin films as a sensing membrane for pH-ISFET application",

author = "Pan, {Tung Ming} and Chen, {Fa Hsyang} and Lee, {Cheng Da} and Chien, {Yu Kai} and Ko, {Ho Ming}",

year = "2009",

doi = "10.1109/ISDRS.2009.5378146",

language = "英语",

isbn = "9781424460304",

series = "2009 International Semiconductor Device Research Symposium, ISDRS '09",

booktitle = "2009 International Semiconductor Device Research Symposium, ISDRS '09",

note = "2009 International Semiconductor Device Research Symposium, ISDRS '09 ; Conference date: 09-12-2009 Through 11-12-2009",

}

Pan, TM, Chen, FH, Lee, CD, Chien, YK & Ko, HM 2009, High-k Yb₂O₃ thin films as a sensing membrane for pH-ISFET application. 於 2009 International Semiconductor Device Research Symposium, ISDRS '09., 5378146, 2009 International Semiconductor Device Research Symposium, ISDRS '09, 2009 International Semiconductor Device Research Symposium, ISDRS '09, College Park, MD, 美國, 09/12/09. https://doi.org/10.1109/ISDRS.2009.5378146

TY - GEN

T1 - High-k Yb2O3 thin films as a sensing membrane for pH-ISFET application

AU - Pan, Tung Ming

AU - Chen, Fa Hsyang

AU - Lee, Cheng Da

AU - Chien, Yu Kai

AU - Ko, Ho Ming

PY - 2009

Y1 - 2009

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U2 - 10.1109/ISDRS.2009.5378146

DO - 10.1109/ISDRS.2009.5378146

M3 - 会议稿件

AN - SCOPUS:77949356161

SN - 9781424460304

T3 - 2009 International Semiconductor Device Research Symposium, ISDRS '09

BT - 2009 International Semiconductor Device Research Symposium, ISDRS '09

T2 - 2009 International Semiconductor Device Research Symposium, ISDRS '09

Y2 - 9 December 2009 through 11 December 2009

ER -