Humidification of large-scale cleanrooms by adiabatic humidification method in subtropical areas: An industrial case study

This study investigates the performance of adiabatic humidification in a large-scale cleanroom with various humidification methods. Theoretical analysis and experimental results show that adiabatic humidification is feasible. The relative humidity (RH) distribution in the cleanroom was within ±1% and the time variation of RH was within ±1% also, even when humidity of make-up air varies drastically. We found that adiabatic humidification with spray nozzles using "high-pressure water atomization " method is favorable than the "two-fluids humidification" method. The effect on energy-saving of adiabatic humidification and operational/initial cost of various humidification methods are also discussed.