TY - JOUR
T1 - Impact of Sr-doping on structural and electrical properties of Pb(Zr0.52Ti0.48)O3 thin films on RuO2 electrodes
AU - Prasad Bag, Sankar
AU - Her, Jim Long
AU - Pan, Tung Ming
N1 - Publisher Copyright:
© 2017 Elsevier Ltd and Techna Group S.r.l.
PY - 2017
Y1 - 2017
N2 - In this paper, we investigated the impact of Sr-doping on the structural properties and electrical characteristics of lead zirconate titanate [Pb(Zr0.52Ti0.48)O3, PZT] thin films deposited on RuO2 electrodes by a sol-gel process and spin-coating technique. We used X-ray diffraction, atomic force microscopy, X-ray photoelectron spectroscopy, and field-emission transmission electron microscopy to explore the structural, morphological, chemical, and microstructural features, respectively, of these films as a function of the growth condition (strontium doping concentrations varied from 1, 3, and 5 mol%). The PZT thin film processed at the 3 mol% Sr exhibited the best electrical characteristics, including a low leakage current of 2.27×10−7 A/cm2 at an electric field of 50 kV/cm, a large capacitance value of 2.74 μF/cm2 at a frequency of 10 kHz, and a high remanent polarization of 37.95 μC/cm2 at a frequency of 5 kHz. We attribute this behavior to the optimal amount of strontium in the PZT film forming a perovskite structure and a thicker interfacial layer at the PSZT film-RuO2 electrode interface.
AB - In this paper, we investigated the impact of Sr-doping on the structural properties and electrical characteristics of lead zirconate titanate [Pb(Zr0.52Ti0.48)O3, PZT] thin films deposited on RuO2 electrodes by a sol-gel process and spin-coating technique. We used X-ray diffraction, atomic force microscopy, X-ray photoelectron spectroscopy, and field-emission transmission electron microscopy to explore the structural, morphological, chemical, and microstructural features, respectively, of these films as a function of the growth condition (strontium doping concentrations varied from 1, 3, and 5 mol%). The PZT thin film processed at the 3 mol% Sr exhibited the best electrical characteristics, including a low leakage current of 2.27×10−7 A/cm2 at an electric field of 50 kV/cm, a large capacitance value of 2.74 μF/cm2 at a frequency of 10 kHz, and a high remanent polarization of 37.95 μC/cm2 at a frequency of 5 kHz. We attribute this behavior to the optimal amount of strontium in the PZT film forming a perovskite structure and a thicker interfacial layer at the PSZT film-RuO2 electrode interface.
KW - Electrical properties
KW - Lead zirconate titanate (PZT)
KW - Sol-gel
KW - Structure
KW - Thin films
UR - http://www.scopus.com/inward/record.url?scp=85019097683&partnerID=8YFLogxK
U2 - 10.1016/j.ceramint.2017.04.160
DO - 10.1016/j.ceramint.2017.04.160
M3 - 文章
AN - SCOPUS:85019097683
SN - 0272-8842
VL - 43
SP - 9806
EP - 9814
JO - Ceramics International
JF - Ceramics International
IS - 13
ER -