Improved bipolar resistive switching memory using W/TaOx/W structure

Amit Prakash*, Siddheswar Maikap, H. Y. Lee, G. Chen, F. Chen, Min Jing Tsai, M. J. Kao

*此作品的通信作者

研究成果: 圖書/報告稿件的類型會議稿件同行評審

4 引文 斯高帕斯(Scopus)

摘要

Resistive switching memory characteristics of high-κ TaOx film in a W/TaOx/W structure have been investigated and compared with Al/TaOx/W structure. Amorphous TaOx film with a thickness of 6.8 nm was confirmed by HRTEM image and EDX analysis. The switching in Al/TaOx/W structure is found to be unstable with large variations in set and reset voltages. The memory device in W/TaOx/W structure shows good memory characteristics with a low power of ∼500μAx1.6V. The current conduction mechanism is fitted to Ohmic and SCLC in LRS and HRS, respectively. The memory device has shown good endurance characteristics of >5×103 cycles and good data retention with a stable HRS/LRS.

原文英語
主出版物標題Micro Nano Devices, Structure and Computing Systems
頁面333-337
頁數5
DOIs
出版狀態已出版 - 2011
事件2010 International Conference on Micro Nano Devices, Structure and Computing Systems, MNDSCS 2010 - Singapore, 新加坡
持續時間: 06 11 201007 11 2010

出版系列

名字Advanced Materials Research
159
ISSN(列印)1022-6680

Conference

Conference2010 International Conference on Micro Nano Devices, Structure and Computing Systems, MNDSCS 2010
國家/地區新加坡
城市Singapore
期間06/11/1007/11/10

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