TY - JOUR
T1 - Manufacture of unitary/binary ordered arrays employing self-assembled nanocolloid lithography
AU - Weng, Chun Jui
AU - Wu, Yu Chen
AU - Liu, Shih Jung
N1 - Publisher Copyright:
© 2021 The Japan Society of Applied Physics.
PY - 2021/3
Y1 - 2021/3
N2 - This paper details the fabrication of unitary and binary nanocolloid arrays using the spin coating technique. Polystyrene spheres of 900 and 100 nm in size were overlaid on the surface of a silicon substrate using a spin coater. To prepare the unitary nanosphere arrays, nanosphere latex spheres of 900 or 100 nm were first mixed with surfactant solution and then spin-coated onto the silicon substrate. For the binary spin coating, both 900 and 100 nm colloidal nanospheres were mixed with surfactant solutions and then concurrently spin-coated. Fabricated nanosphere arrays were evaluated via both scanning electron and atomic force microscopy. The influence of processing parameters, including type of surfactant, nanosphere to surfactant ratio, spin speed, and spin time on the ordering of colloidal array have been identified; after this step is complete, steps can be taken to optimize the process. These steps provide advantages in terms of improved nanosphere array quality.
AB - This paper details the fabrication of unitary and binary nanocolloid arrays using the spin coating technique. Polystyrene spheres of 900 and 100 nm in size were overlaid on the surface of a silicon substrate using a spin coater. To prepare the unitary nanosphere arrays, nanosphere latex spheres of 900 or 100 nm were first mixed with surfactant solution and then spin-coated onto the silicon substrate. For the binary spin coating, both 900 and 100 nm colloidal nanospheres were mixed with surfactant solutions and then concurrently spin-coated. Fabricated nanosphere arrays were evaluated via both scanning electron and atomic force microscopy. The influence of processing parameters, including type of surfactant, nanosphere to surfactant ratio, spin speed, and spin time on the ordering of colloidal array have been identified; after this step is complete, steps can be taken to optimize the process. These steps provide advantages in terms of improved nanosphere array quality.
UR - http://www.scopus.com/inward/record.url?scp=85102466555&partnerID=8YFLogxK
U2 - 10.35848/1347-4065/abe817
DO - 10.35848/1347-4065/abe817
M3 - 文章
AN - SCOPUS:85102466555
SN - 0021-4922
VL - 60
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 3
M1 - 036502
ER -