@inproceedings{95b89d305c5f4f8a802f91b30c214d60,
title = "Memory characteristics of IrOx metal nanocrystals embedded in high- κ Al2O3 films with IrOx metal gate",
abstract = "The memory characteristics of IrOx metal nanocrystals in an n-Si/SiO2/Al2O3/IrOx/Al 2O3/IrOx structure with a small EOT of ∼6 nm have been investigated. The IrOx metal nanocrystals with a small size of ∼3 nm and high-density of ∼0.7{\texttimes}1013/cm 2 have been observed. The enhanced memory characteristics with a large memory window of ΔV-4V at a small gate voltage of <5V and good endurance of 104 cycles are achieved due to the charge storage in the IrOx nanocrystals.",
keywords = "AlO, Flash memory, High-κ, IrO nanocrystals, Metal gate, Nanotechnology, Nonvolatile memory",
author = "S. Maikap and W. Banerjee and Li, \{W. C.\} and Yang, \{J. R.\}",
year = "2009",
language = "英语",
isbn = "9789810836948",
series = "2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009",
pages = "378--381",
booktitle = "2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009",
note = "2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009 ; Conference date: 26-07-2009 Through 30-07-2009",
}