Micro Electrothermal Actuators and Their Applications on Micro-Optics

　　　　　本文針對兩種微型電熱式致動器之設計及性能分析做深入研究，並利用微機電系統製程技術製作了一系列之微元件。研究結果顯示適當的尺寸設計可大幅提高微致動器之輸出位移及輸出力。本研究並將微型致動器整合於微光學系統，並探討其可能應用。
　　　　　In the past few years, MEMS technology and micromachining techniques have been applied to fabricated micro electrothermal actuators in our group. The performance of the actuators has been characterized. Several micro optical key components, including rotary and oscillating mirrors have also been demonstrated for optical applications by integrating these actuators. In this paper, we will summarize our experience of this endeavor.