Novel flash ion sensitive field effect transistor for chemical sensor applications

Chao Sung Lai*, Tseng Fu Lu, Jer Chyi Wang

*此作品的通信作者

研究成果: 圖書/報告稿件的類型會議稿件同行評審

摘要

Electrolyte-insulator-semiconductor (EIS) devices with programmable Sm 2O 3/Si 3N 4/SiO 2 and HfO 2/gadolinium oxide nanocrystals (Gd 2O 3-NCs)/SiO 2 structures are demonstrated for pH detection. The proposed programmable EIS sensors with multiple sensing membranes exhibit a high pH sensitivity (larger than the ideal Nernst response, 59.16 mV/pH at 25°C) owing to the hydrogen ions attraction by electrons trapped within the embedded trapping layers (Si 3N 4 and Gd 2O 3-NCs) after programming. When compared with the conventional EIS devices, the programmable EIS sensors with programming provide the possibility for the small pH fluctuation detection and can be used in future pH sensor applications owing to its high pH sensing response.

原文英語
主出版物標題Proceedings - 2011 IEEE 9th International Conference on ASIC, ASICON 2011
頁面528-530
頁數3
DOIs
出版狀態已出版 - 2011
事件2011 IEEE 9th International Conference on ASIC, ASICON 2011 - Xiamen, 中國
持續時間: 25 10 201128 10 2011

出版系列

名字Proceedings of International Conference on ASIC
ISSN(列印)2162-7541
ISSN(電子)2162-755X

Conference

Conference2011 IEEE 9th International Conference on ASIC, ASICON 2011
國家/地區中國
城市Xiamen
期間25/10/1128/10/11

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