Optimization of the Geometrical Design for an All-Dielectric Metasurface Sensor with a High Refractive-Index Response

This study aims to develop a refractive-index sensor operating in the visible region using an all-dielectric metasurface, which was chosen for its advantages of low optical loss and narrow spectral bandwidth, compared to those of conventional metallic metasurfaces. COMSOL software was utilized as a calculation tool to simulate the resonant properties of an all-dielectric metasurface composed of a circular nanohole-structured titanium oxide (TiO₂) thin film, with the aim of enhancing the sensitivity of the refractive index for sensing targets. The simulation focused on finding the best geometrical conditions for the all-dielectric metasurface to achieve high sensitivity. Two resonance modes observed in this metasurface were considered: the quasi-bound-state-in-the-continuum (qBIC) mode and the perfect-reflection (PR) mode. The simulated results demonstrated that high sensitivities of 257 nm/RIU at the PR mode and 94 nm/RIU at the qBIC mode in the visible spectral range could be obtained by periodically constructing the metasurface with a unit cell having a lattice constant of 350 nm, a nanohole radius of 160 nm, and a nanohole depth of 250 nm. Furthermore, the study showed that the resonance mode that enabled high sensitivity was the PR mode, with a sensitivity nearly three times larger than that of the qBIC mode and the ability to reach the highest reflectance at the resonance wavelength. The optimized feature had the highest reflectance at a resonant wavelength of 570.19 nm, and although the quality factor was 25.50, these designed parameters were considered sufficient for developing a refractive index biosensor with high sensitivity and optical efficiency when operating in the visible spectral range.