Physical and electrical characteristics of the high-k Nd2O3 polyoxide deposited on polycrystalline silicon

Chyuan Haur Kao*, T. C. Chan, Kung Shao Chen, Yu Teng Chung, Wen Shih Luo

*此作品的通信作者

研究成果: 期刊稿件文章同行評審

13 引文 斯高帕斯(Scopus)

指紋

深入研究「Physical and electrical characteristics of the high-k Nd2O3 polyoxide deposited on polycrystalline silicon」主題。共同形成了獨特的指紋。

Engineering

Material Science