Physical properties of amorphous InGaZnO4 films doped with Mn

Shiu Jen Liu*, Hau Wei Fang, Shih Hao Su, Chia Hung Li, Jyh Shiarn Cherng, Jang Hsing Hsieh, Jenh Yih Juang

*此作品的通信作者

研究成果: 期刊稿件文章同行評審

18 引文 斯高帕斯(Scopus)

摘要

Amorphous InGaZnO4 (a-IGZO) films doped with various concentrations of Mn have been fabricated by using pulsed-laser deposition technique. Optical, electrical, and magnetic properties of the prepared Mn-doped a-IGZO films were investigated. The resistivity, carrier concentration, and carrier mobility of the a-IGZO films were found to be, respectively, increased, decreased, and enhanced by Mn doping. Moreover, the optical transmission is slightly increased in the visible range and the optical band gaps are not affected in the Mn-doped films. Room-temperature ferromagnetism has been observed in the field-dependent magnetization measurements.

原文英語
文章編號092504
期刊Applied Physics Letters
94
發行號9
DOIs
出版狀態已出版 - 2009
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