摘要
Intrinsic semiconductor epilayer are frequently adopted in power devices to increase their BV and decrease their leakage current. High purity Pr2O3-added GaAs liquid phase epitaxial layers are grown with low background carrier concentrations. Their surface chemical structures are investigated by using X-ray photoelectron spectroscopy. As the surface oxidation is lowered, these (Au, Ag, Ni, Pt)/GaAs Schottky structures all show an improved diode property by addition of Pr2O3. The resulting barrier height and ideality factor can be as high as 0.94±0.02 eV and as unitary as 1.03±0.01, respectively. A leakage current of around 0.7×10-6 A and a breakdown voltage of 140 V is also obtained. These grown SDs were also irradiated by gamma-ray for the study of radiation hardness. After 4 h irradiation, all samples are out of function at beginning. However, 4 h latter, because of the nature annealing, the SBH of those added samples can recover to 72% of their original SBH values. Further, another 24 h past, the tendency of recovery is saturated and a 19% SBH retard is still left. During this period, the appropriate Pr2O3-added SDs show out better radiation hardness property with compare to the unadded one.
| 原文 | 英語 |
|---|---|
| 頁(從 - 到) | 521-526 |
| 頁數 | 6 |
| 期刊 | Microelectronics Journal |
| 卷 | 30 |
| 發行號 | 6 |
| DOIs | |
| 出版狀態 | 已出版 - 06 1999 |
| 對外發佈 | 是 |
指紋
深入研究「Rare earth doped high barrier height Schottky devices」主題。共同形成了獨特的指紋。引用此
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