@inproceedings{530c923f829e40be9e80d83bceb50581,
title = "Robust PH sensing characteristics of RINOS structure with SM 2O3 sensing membrane and rapid thermal annealing for biosensor application",
abstract = "This investigation proposes a novel Sm2O3/Si 3N4/SiO2/Si RINOS device with an ONO (oxide-nitride-oxide) structure and Sm2O3 as the sensing membrane. To improve the sensing properties, the Sm2O3 was treated by RTA. Post deposition annealing (PDA) at 700°C increased the pH sensitivity of a 4nm-thick Sm2O3 sensing membrane from 41.69 to 55.44 mV/pH and improved the hysteresis and drift characteristics. Stress at - 17V for 10 s, further enhanced the pH sensitivity to 70.13 mV/pH, which was higher than the Nernstian value. Moreover, this device can be operated by applying program/erase (P/E) stress to increase/reduce the pH sensitivity stable for over 100 P/E cyclings. The novel RINOS structure with Sm 2O3 sensing membrane and RTAis a promising candidate for sensing ultra small signals in the human body micro-fluid applications.",
author = "Wang, {Jer Chyi} and Lai, {Chao Sung} and Kao, {Chyuan Haur} and Shih, {Hui Yu} and Lu, {Tseng Fu}",
year = "2011",
doi = "10.3850/978-981-08-7615-9-BS05",
language = "英语",
isbn = "9789810876159",
series = "ISOB 2011 - Proceedings of the 1st International Symposium ISOB 2011 - Proceedings of the 1st International Symposium on Bioengineering",
pages = "27--33",
booktitle = "ISOB 2011 - Proceedings of the 1st International Symposium on Bioengineering",
note = "1st International Symposium on Bioengineering, ISOB 2011 ; Conference date: 19-01-2011 Through 19-01-2011",
}