SF6 plasma-Assisted Au nanostructure formation for LSPR sensing

Chih Ching Ho; Chia Ming Yang

doi:10.1117/12.2690425

SF6 plasma-Assisted Au nanostructure formation for LSPR sensing

Chih Ching Ho
, Chia Ming Yang

光電工程研究所(碩士班)

Chang Gung University

研究成果: 圖書/報告稿件的類型 › 會議稿件 › 同行評審

摘要

LSPR sensing applications benefit from well-crafted nanostructures. Current methods, using RTA on a thin metal film, result in random distribution and size variation. We introduce SF6 plasma surface treatment with ICP-RIE before Au deposition, altering surface affinity to improve gold nanostructure formation. Contact angle measurement verified treatment effectiveness. AFM and SEM examined the nanostructure after fabrication. The absorption spectrum comparison confirmed plasma-Treated substrates exhibited enhanced absorptive characteristics for LSPR sensing.

原文	英語
主出版物標題	Functional Material Applications
主出版物子標題	From Energy to Sensing
編輯	Alistair H. Kean, Nikhil Bhalla
發行者	SPIE
ISBN（電子）	9781510668454
DOIs	https://doi.org/10.1117/12.2690425
出版狀態	已出版 - 2023
事件	Functional Material Applications: From Energy to Sensing 2023 - Glasgow, 英國持續時間: 24 10 2023 → 25 10 2023

出版系列

名字	Proceedings of SPIE - The International Society for Optical Engineering
卷	12796
ISSN（列印）	0277-786X
ISSN（電子）	1996-756X

Conference

Conference	Functional Material Applications: From Energy to Sensing 2023
國家/地區	英國
城市	Glasgow
期間	24/10/23 → 25/10/23

文獻附註

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© 2023 SPIE. All rights reserved.

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10.1117/12.2690425

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引用此

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title = "SF6 plasma-Assisted Au nanostructure formation for LSPR sensing",

abstract = "LSPR sensing applications benefit from well-crafted nanostructures. Current methods, using RTA on a thin metal film, result in random distribution and size variation. We introduce SF6 plasma surface treatment with ICP-RIE before Au deposition, altering surface affinity to improve gold nanostructure formation. Contact angle measurement verified treatment effectiveness. AFM and SEM examined the nanostructure after fabrication. The absorption spectrum comparison confirmed plasma-Treated substrates exhibited enhanced absorptive characteristics for LSPR sensing.",

keywords = "biosensing, LSPR, nanostructure, surface modification",

author = "Ho, \{Chih Ching\} and Yang, \{Chia Ming\}",

year = "2023",

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Ho, CC & Yang, CM 2023, SF6 plasma-Assisted Au nanostructure formation for LSPR sensing. 於 AH Kean & N Bhalla (編輯), Functional Material Applications: From Energy to Sensing., 1279607, Proceedings of SPIE - The International Society for Optical Engineering, 卷 12796, SPIE, Functional Material Applications: From Energy to Sensing 2023, Glasgow, 英國, 24/10/23. https://doi.org/10.1117/12.2690425

SF6 plasma-Assisted Au nanostructure formation for LSPR sensing. / Ho, Chih Ching; Yang, Chia Ming.
Functional Material Applications: From Energy to Sensing. 編輯 / Alistair H. Kean; Nikhil Bhalla. SPIE, 2023. 1279607 (Proceedings of SPIE - The International Society for Optical Engineering; 卷 12796).

研究成果: 圖書/報告稿件的類型 › 會議稿件 › 同行評審

TY - GEN

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AU - Ho, Chih Ching

AU - Yang, Chia Ming

PY - 2023

Y1 - 2023

N2 - LSPR sensing applications benefit from well-crafted nanostructures. Current methods, using RTA on a thin metal film, result in random distribution and size variation. We introduce SF6 plasma surface treatment with ICP-RIE before Au deposition, altering surface affinity to improve gold nanostructure formation. Contact angle measurement verified treatment effectiveness. AFM and SEM examined the nanostructure after fabrication. The absorption spectrum comparison confirmed plasma-Treated substrates exhibited enhanced absorptive characteristics for LSPR sensing.

AB - LSPR sensing applications benefit from well-crafted nanostructures. Current methods, using RTA on a thin metal film, result in random distribution and size variation. We introduce SF6 plasma surface treatment with ICP-RIE before Au deposition, altering surface affinity to improve gold nanostructure formation. Contact angle measurement verified treatment effectiveness. AFM and SEM examined the nanostructure after fabrication. The absorption spectrum comparison confirmed plasma-Treated substrates exhibited enhanced absorptive characteristics for LSPR sensing.

KW - biosensing

KW - LSPR

KW - nanostructure

KW - surface modification

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DO - 10.1117/12.2690425

M3 - 会议稿件

AN - SCOPUS:85179587325

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Functional Material Applications

A2 - Kean, Alistair H.

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PB - SPIE

T2 - Functional Material Applications: From Energy to Sensing 2023

Y2 - 24 October 2023 through 25 October 2023

ER -

SF6 plasma-Assisted Au nanostructure formation for LSPR sensing

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