Size effect in Cu nano-interconnects and its implication on electromigration

Yuejin Hou*, Cher Ming Tan

*此作品的通信作者

研究成果: 圖書/報告稿件的類型會議稿件同行評審

6 引文 斯高帕斯(Scopus)

摘要

With the interconnect dimensions approaching the length of the mean free path (MFP) of the electron, size effects are becoming important. This is manifested in the increase of the resistivity for nano-interconnects. This change in the electrical properties will pose new challenges in the EM performance for Cu nano-interconnects.

原文英語
主出版物標題2008 2nd IEEE International Nanoelectronics Conference, INEC 2008
頁面610-613
頁數4
DOIs
出版狀態已出版 - 2008
對外發佈
事件2008 2nd IEEE International Nanoelectronics Conference, INEC 2008 - Shanghai, 中國
持續時間: 24 03 200827 03 2008

出版系列

名字2008 2nd IEEE International Nanoelectronics Conference, INEC 2008

Conference

Conference2008 2nd IEEE International Nanoelectronics Conference, INEC 2008
國家/地區中國
城市Shanghai
期間24/03/0827/03/08

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