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Structure analysis, mechanical property, and biocompatibility of TaOxNy thin films
J. H. Hsieh
*
, Y. H. Lai, Y. C. Lin, S. J. Liao, C. Li, Y. H. Chang, C. C. Hu
*
此作品的通信作者
化工與材料工程學系(含學碩博士班及碩士在職專班)
Ming Chi University of Technology
National Yang Ming Chiao Tung University
Chang Gung Memorial Hospital
研究成果
:
期刊稿件
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文章
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同行評審
6
引文 斯高帕斯(Scopus)
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指紋
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深入研究「Structure analysis, mechanical property, and biocompatibility of TaOxNy thin films」主題。共同形成了獨特的指紋。
排序方式
重量
按字母排序
Physics
Oxygen
100%
Thin Films
100%
Biocompatibility
100%
Strength of Materials
100%
Flow Velocity
71%
Viability
42%
Deposition
28%
Oxide
14%
Value
14%
Ratios
14%
Nitrogen Atom
14%
Roughness
14%
Surface Roughness
14%
Surface Energy
14%
Crystal Structure
14%
Chemistry
Liquid Film
100%
Structure
100%
Analytical Method
100%
Mechanical Property
100%
Dioxygen
77%
Flow Kinetics
55%
Cell Viability
33%
Sample
11%
Oxide
11%
Roughness
11%
Interfacial Energy
11%
Crystal Structure
11%
Substitution Reaction
11%
Hardness
11%
Surface Roughness
11%
Material Science
Film
100%
Thin Films
100%
Biocompatibility
100%
Mechanical Property
100%
Crystalline Material
40%
Oxide
20%
Amorphous Material
20%
Mechanical Property
20%
Surface Roughness
20%
Surface Energy
20%
Grain Size
20%
Hardness
20%
Crystal Structure
20%
Engineering
Flow Rate
100%
Thin Films
100%
Properties
100%
Roughness
40%
Mechanical Properties
20%
Surfaces
20%
Nitrogen Atom
20%
Deposited Film
20%
Crystal Structure
20%
High Hardness
20%
Oxygen Content
20%
Energy Surface
20%
Maximum Value
20%
E Modulus
20%
Tailored Property
20%