摘要
A 2-D virtual wafer fabrication simulation suite has been employed for the technology CAD of SiGe channel heterojunction field effect transistors (HFETs). Complete fabrication process of SiGep-HFETs has been simulated. The SiGe material parameters and mobility model were incorporated to simulate Si/SiGe p-HFETs with a uniform germanium channel having an Leff of 0.5 μm. A significant improvement in linear transconductance is observed when compared to control-silicon p-MOSFETs.
原文 | 英語 |
---|---|
頁(從 - 到) | 195-199 |
頁數 | 5 |
期刊 | Defence Science Journal |
卷 | 51 |
發行號 | 2 |
DOIs | |
出版狀態 | 已出版 - 04 2001 |
對外發佈 | 是 |