Technology CAD of SiGe-heterojunction field effect transistors

S. Maikap*, B. Senapati, C. K. Maiti

*此作品的通信作者

研究成果: 期刊稿件文章同行評審

1 引文 斯高帕斯(Scopus)

摘要

A 2-D virtual wafer fabrication simulation suite has been employed for the technology CAD of SiGe channel heterojunction field effect transistors (HFETs). Complete fabrication process of SiGep-HFETs has been simulated. The SiGe material parameters and mobility model were incorporated to simulate Si/SiGe p-HFETs with a uniform germanium channel having an Leff of 0.5 μm. A significant improvement in linear transconductance is observed when compared to control-silicon p-MOSFETs.

原文英語
頁(從 - 到)195-199
頁數5
期刊Defence Science Journal
51
發行號2
DOIs
出版狀態已出版 - 04 2001
對外發佈

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