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The deposition and microstructure of amorphous tungsten oxide films by sputtering
Chuan Li
*
, J. H. Hsieh, Ming Tsung Hung, B. Q. Huang
*
此作品的通信作者
National Yang Ming Chiao Tung University
National Central University
Ming Chi University of Technology
研究成果
:
期刊稿件
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同行評審
20
引文 斯高帕斯(Scopus)
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重量
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Physics
Deposition
100%
Tungsten
100%
Sputtering
100%
Oxygen
100%
Flow Velocity
80%
Oxide
40%
Metal
40%
X Ray Spectroscopy
40%
Spectrometer
40%
Colour
40%
Independent Variables
20%
Gaps
20%
Ion
20%
Scanning Electron Microscopy
20%
Targets
20%
X Ray Diffraction
20%
Spectroscopy
20%
Electric Potential
20%
Electrons
20%
Darkness
20%
Existence
20%
Light Emission
20%
Electrostatic Probe
20%
Material Science
Amorphous Material
100%
Microstructure
100%
Sputtering
100%
Tungsten
100%
Metal
50%
Oxide
50%
Color
50%
X-Ray Diffraction
25%
Scanning Electron Microscopy
25%
Absorbance
25%
Energy-Dispersive X-Ray Spectroscopy
25%
Electrochromics
25%
Probe
25%
Near Infrared Spectroscopy
25%
Chemistry
Liquid Film
100%
Microstructure
100%
Sputtering
100%
Tungsten Oxide
100%
Dioxygen
41%
Flow Kinetics
33%
Metal
16%
Phase Composition
16%
Color
16%
Sample
8%
Oxide
8%
Voltage
8%
Electron Particle
8%
Ion
8%
Scanning Electron Microscopy
8%
UV/VIS Spectroscopy
8%
Band Gap
8%
Deposition Process
8%
Tungsten
8%
Amorphous Structure
8%
Dark Blue
8%
Vis-NIR Spectroscopy
8%
Plasma
8%