The quantum confinement effect of InGaN/GaN nanorods by photoelectrochemical oxidation

Woei Tyng Lin*, Fang I. Lai, Shou Yi Kuo, Shao Chun Huang

*此作品的通信作者

研究成果: 圖書/報告稿件的類型會議稿件同行評審

摘要

In this study, the nanorods of 100-150nm diameter on an InGaN/GaN multi quantum well (MQW) structure were fabricated using self-assembled nickel metal nanomasks and inductively coupled plasma reactive ion etching. The photoelectron- chemical (PEC) methods were applied to oxidate the InGaN/GaN MQWs nanorods. After 5V/80min oxidation, the measured PL from the embedded InGaN/GaN MQWs shows an energy shift of 30meV and a smaller QCSE, which are caused by quantum confinement effect and the strain relaxation of MQWs. The blue shift range increased with decreasing MQWs diameter.

原文英語
主出版物標題4th IEEE International NanoElectronics Conference, INEC 2011
DOIs
出版狀態已出版 - 2011
事件4th IEEE International Nanoelectronics Conference, INEC 2011 - Tao-Yuan, 台灣
持續時間: 21 06 201124 06 2011

出版系列

名字Proceedings - International NanoElectronics Conference, INEC
ISSN(列印)2159-3523

Conference

Conference4th IEEE International Nanoelectronics Conference, INEC 2011
國家/地區台灣
城市Tao-Yuan
期間21/06/1124/06/11

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