Transmission electron microscopy analysis of "black belt:" The masking film of white ribbon of Kooi effect in the local oxidation of silicon process

Tan Tsu Sheng; Chih Yuan Lu; Ruey Dar Chang; Song Tsan Chiang

doi:10.1063/1.356057

Transmission electron microscopy analysis of "black belt:" The masking film of white ribbon of Kooi effect in the local oxidation of silicon process

Tan Tsu Sheng^*
, Chih Yuan Lu
, Ruey Dar Chang
, Song Tsan Chiang

^*此作品的通信作者

Industrial Technology Research Institute of Taiwan

研究成果: 期刊稿件 › 文章 › 同行評審

2 引文斯高帕斯（Scopus）

摘要

The first direct observation of the top view of micromasking film on the Si surface to gate oxidation in the local oxidation of silicon process with transmission electron microscopy (TEM) has been made. The micromasking film looks like an "eyelash" in cross-sectional transmission electron microscopy and like a "black belt" in top view TEM. In addition, direct and sequential TEM observations on the removal of the micromasking film by sacrificial oxidation were presented.

原文	英語
頁（從 - 到）	3810-3813
頁數	4
期刊	Journal of Applied Physics
卷	75
發行號	8
DOIs	https://doi.org/10.1063/1.356057
出版狀態	已出版 - 1994
對外發佈	是

存取文件

10.1063/1.356057

其它文件與鏈接

Link to publication in Scopus

引用此

@article{dd07eeb7683c4c79ae837faac9f60d3b,

title = "Transmission electron microscopy analysis of {"}black belt:{"} The masking film of white ribbon of Kooi effect in the local oxidation of silicon process",

abstract = "The first direct observation of the top view of micromasking film on the Si surface to gate oxidation in the local oxidation of silicon process with transmission electron microscopy (TEM) has been made. The micromasking film looks like an {"}eyelash{"} in cross-sectional transmission electron microscopy and like a {"}black belt{"} in top view TEM. In addition, direct and sequential TEM observations on the removal of the micromasking film by sacrificial oxidation were presented.",

author = "Sheng, \{Tan Tsu\} and Lu, \{Chih Yuan\} and Chang, \{Ruey Dar\} and Chiang, \{Song Tsan\}",

year = "1994",

doi = "10.1063/1.356057",

language = "英语",

volume = "75",

pages = "3810--3813",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "8",

}

TY - JOUR

T1 - Transmission electron microscopy analysis of "black belt:" The masking film of white ribbon of Kooi effect in the local oxidation of silicon process

AU - Sheng, Tan Tsu

AU - Lu, Chih Yuan

AU - Chang, Ruey Dar

AU - Chiang, Song Tsan

PY - 1994

Y1 - 1994

N2 - The first direct observation of the top view of micromasking film on the Si surface to gate oxidation in the local oxidation of silicon process with transmission electron microscopy (TEM) has been made. The micromasking film looks like an "eyelash" in cross-sectional transmission electron microscopy and like a "black belt" in top view TEM. In addition, direct and sequential TEM observations on the removal of the micromasking film by sacrificial oxidation were presented.

AB - The first direct observation of the top view of micromasking film on the Si surface to gate oxidation in the local oxidation of silicon process with transmission electron microscopy (TEM) has been made. The micromasking film looks like an "eyelash" in cross-sectional transmission electron microscopy and like a "black belt" in top view TEM. In addition, direct and sequential TEM observations on the removal of the micromasking film by sacrificial oxidation were presented.

UR - https://www.scopus.com/pages/publications/36448999219

U2 - 10.1063/1.356057

DO - 10.1063/1.356057

M3 - 文章

AN - SCOPUS:36448999219

SN - 0021-8979

VL - 75

SP - 3810

EP - 3813

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 8

ER -

Transmission electron microscopy analysis of "black belt:" The masking film of white ribbon of Kooi effect in the local oxidation of silicon process

摘要

存取文件

其它文件與鏈接

指紋

引用此