Very low voltage SiO2/HfON/HfAlO/TaN memory with fast speed and good retention

C. H. Lai, Albert Chin, H. L. Kao, K. M. Chen, M. Hong, J. Kwo, C. C. Chi

研究成果: 圖書/報告稿件的類型會議稿件同行評審

40 引文 斯高帕斯(Scopus)

摘要

At 85°C under very low ± 8V and fast 100μs P/E, good memory device integrity of 2.5V initial AVth and 1.45V 10-year extrapolated retention are obtained. This was achieved in SiO2/HfON/HfAlO/TaN MONOS using very high-K (∼22) and deep trapping HfON, which further gives good 1.0V 10-year memory window even at 125°C.

原文英語
主出版物標題2006 Symposium on VLSI Technology, VLSIT - Digest of Technical Papers
頁面44-45
頁數2
出版狀態已出版 - 2006
對外發佈
事件2006 Symposium on VLSI Technology, VLSIT - Honolulu, HI, 美國
持續時間: 13 06 200615 06 2006

出版系列

名字Digest of Technical Papers - Symposium on VLSI Technology
ISSN(列印)0743-1562

Conference

Conference2006 Symposium on VLSI Technology, VLSIT
國家/地區美國
城市Honolulu, HI
期間13/06/0615/06/06

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